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Authors: Igor Bejenari; Alexander Burenkov; Peter Pichler; Ioannis Deretzis; Antonino La Magna
Journal title: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2020)
Journal number: 2
Journal publisher: IEEE
Published year: 2020
Published pages: 67-70
DOI identifier: 10.23919/sispad49475.2020.9241646