Piezoresistive Cantilevers’ Platform for Bio-Chemical Sensing

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Authors: V. Stavrov, G. Stavreva, E. Tomerov, M. Villani, S. Kotsev, K. Kostadinov

Journal title: Proc. IEEE 3M-NANO 2021, 2021, China

Journal publisher: IEEE

Published year: 2021

DOI identifier: 10.1109/3m-nano49087.2021.9599795