A submicrometre silicon-on-insulator resonator for ultrasound detection

Summary

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Authors: Rami Shnaiderman, Georg Wissmeyer, Okan Ülgen, Qutaiba Mustafa, Andriy Chmyrov & Vasilis Ntziachristos

Journal title: Nature

Journal number: 585

Journal publisher: Nature Publishing Group

Published year: 2020

Published pages: 372–378

DOI identifier: 10.1038/s41586-020-2685-y

ISSN: 0028-0836