Optimization of Etching Processes for the Fabrication of Smooth Silicon Carbide Membranes for Applications in Quantum Technology

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Authors: Mahsa Mokhtarzadeh; Maria Carulla; Roksolana Kozak; Christian David

Journal title: Micro and Nano Engineering

Journal number: 5

Journal publisher: Elsevier

Published year: 2022

DOI identifier: 10.1016/j.mne.2022.100155

ISSN: 2590-0072