Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Christiaan Bekker, Muhammad Junaid Arshad, Pasquale Cilibrizzi, Charalampos Nikolatos, Peter Lomax, Graham S. Wood, Rebecca Cheung, Wolfgang Knolle, Neil Ross, Brian Gerardot, Cristian Bonato

Journal title: AIP Publishing

Journal publisher: American Institute of Physics

Published year: 2023

DOI identifier: 10.1063/5.0144684

ISSN: 0003-6951