Spatial Atomic Layer Deposition

Summary

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Authors: David Muñoz-Rojas, Viet Huong Nguyen, César Masse de la Huerta, Carmen Jiménez, Daniel Bellet

Journal title: Chemical Vapor Deposition for Nanotechnology

Journal publisher: IntechOpen

Published year: 2019

Published pages: 1-25

DOI identifier: 10.5772/intechopen.82439

ISBN: 978-1-78984-960-8