Influence of the Geometric Parameters on the Deposition Mode in Spatial Atomic Layer Deposition: A Novel Approach to Area-Selective Deposition

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Authors: César Masse de la Huerta, Viet Nguyen, Jean-Marc Dedulle, Daniel Bellet, Carmen Jiménez, David Muñoz-Rojas

Journal title: Coatings

Journal number: 9/1

Journal publisher: MDPI

Published year: 2019

Published pages: 5

DOI identifier: 10.3390/coatings9010005

ISSN: 2079-6412