Speeding up the unique assets of atomic layer deposition

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Authors: D. Muñoz-Rojas, T. Maindron, A. Esteve, F. Piallat, J.C.S. Kools, J.-M. Decams

Journal title: Materials Today Chemistry

Journal number: 12

Journal publisher: Elsevier

Published year: 2019

Published pages: 96-120

DOI identifier: 10.1016/j.mtchem.2018.11.013

ISSN: 2468-5194