In-Volume Laser Direct Writing of Silicon—Challenges and Opportunities

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Authors: M. Chambonneau, D. Grojo, O. Tokel, F. Ö. Ilday, S. Tzortzakis, S. Nolte

Journal title: Laser Photonics Rev.

Journal publisher: Wiley - VCH Verlag GmbH & CO. KGaA

Published year: 2021

DOI identifier: 10.1002/lpor.202100140

ISSN: 1863-8880