On‐chip flow rate sensing via membrane deformation and bistability probed by microwave resonators

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Authors: Arda Secme, Hadi Sedaghat Pisheh, Uzay Tefek, H. Dilara Uslu, Berk Kucukoglu, Ceren Alatas, Mehmet Kelleci, M. Selim Hanay

Journal title: Microfluidics and Nanofluidics

Journal number: 27, 28

Journal publisher: Springer Verlag

Published year: 2023

DOI identifier: 10.1007/s10404-023-02640-9

ISSN: 1613-4982