On-Chip Liquid and Gas Flow Rate Sensing via Membrane Deformation and Bistability Probed by Microwave Resonators

Summary

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Authors: Mehmet Selim Hanay,Arda Secme,Hadi Sedaghat Pisheh,Hatice Dilara Uslu, Mehmet Kelleci

Journal publisher: N/A

Published year: 2022

DOI identifier: 10.21203/rs.3.rs-2260428/v1