Soft‐Chemistry‐Assisted On‐Chip Integration of Nanostructured α‐Quartz Microelectromechanical System

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Claire Jolly, Andres Gomez, David Sánchez‐Fuentes, Dilek Cakiroglu, Raïssa Rathar, Nicolas Maurin, Ricardo Garcia‐Bermejo, Benoit Charlot, Martí Gich, Michael Bahriz, Laura Picas, Adrian Carretero‐Genevrier

Journal title: Advanced Materials Technologies

Journal number: 6/3

Journal publisher: Wiley

Published year: 2021

Published pages: 2000831

DOI identifier: 10.1002/admt.202000831

ISSN: 2365-709X