Tailoring the crystal growth of quartz on silicon for patterning epitaxial piezoelectric films

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Authors: Qianzhe Zhang, David Sánchez-Fuentes, Andrés Gómez, Rudy Desgarceaux, Benoit Charlot, Jaume Gàzquez, Adrián Carretero-Genevrier, Martí Gich

Journal title: Nanoscale Advances

Journal number: 1/9

Journal publisher: RSC

Published year: 2019

Published pages: 3741-3752

DOI identifier: 10.1039/c9na00388f

ISSN: 2516-0230