Micro/Nanostructure Engineering of Epitaxial Piezoelectric α-Quartz Thin Films on Silicon

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Authors: Qianzhe Zhang, David Sánchez-Fuentes, Rudy Desgarceaux, Pau Escofet-Majoral, Judith Oró-soler, Jaume Gázquez, Guilhem Larrieu, Benoit Charlot, Andrés Gómez, Martí Gich, Adrián Carretero-Genevrier

Journal title: ACS Applied Materials & Interfaces

Journal number: 12/4

Journal publisher: American Chemical Society

Published year: 2020

Published pages: 4732-4740

DOI identifier: 10.1021/acsami.9b18555

ISSN: 1944-8244