Integration and fabrication of FB-DRAM cells using III-V nanowires

This deliverable is linked to Task T1.6. which concerns the development of process modules for the III-V memory cell fabrication and its integration. This deliverable wil contain the descripstion of all the actions developed to achieve this goal, and the different accomplished outputs: a) Test structures to derive the physical properties of III-V nanowires b) Process modules for III-V nanowire device fabrication c) Integrated III-V nanowire memory cell