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Authors: J. Lacord, S. Martinia, M.-S. Parihar, K. Lee, M. Bawedin, S. Cristoloveanu, Y. Taur, J.-Ch. Barbe
Journal title: 2017 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
Journal publisher: IEEE
Published year: 2017
Published pages: 321-324
DOI identifier: 10.23919/sispad.2017.8085329
ISBN: 978-4-86348-610-2
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