Doping profile extraction in thin SOI films: Application to A2RAM

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Authors: F. Tcheme Wakam, J. Lacord, M. Bawedin, S. Martinie, S. Cristoloveanu, G. Ghibaudo, J.-Ch. Barbe

Journal title: 2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)

Journal publisher: IEEE

Published year: 2018

Published pages: 1-4

DOI identifier: 10.1109/ULIS.2018.8354339

ISBN: 978-1-5386-4811-7