Summary
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Authors: H. El Dirani, K.H. Lee, M.S. Parihar, J. Lacord, S. Martinie, J-Ch. Barbe, X. Mescot, P. Fonteneau, J.-E. Broquin, G. Ghibaudo, Ph. Galy, F. Gamiz, Y. Taur, Y.-T. Kim, S. Cristoloveanu, M. Bawedin
Journal title: Microelectronic Engineering
Journal number: 178
Journal publisher: Elsevier BV
Published year: 2017
Published pages: 245-249
DOI identifier: 10.1016/j.mee.2017.05.047
ISSN: 0167-9317