Heterogeneous Integration of III-V Materials by Direct Wafer Bonding for High-Performance Electronics and Optoelectronics

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Authors: Daniele Caimi, Preksha Tiwari, Marilyne Sousa, Kirsten E. Moselund, Cezar B. Zota

Journal title: IEEE Transactions on Electron Devices

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2021

Published pages: 1-8

DOI identifier: 10.1109/ted.2021.3067273

ISSN: 0018-9383