Fabrication of division-of-focal-plane polarizer arrays by electron beam lithography

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Authors: Miao Yu, Liang Cao, Li Li, Litong Dong, Lu Wang, Xing Chen, Zhengxun Song, Zhankun Weng, Zuobin Wang

Journal title: 2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

Journal publisher: IEEE

Published year: 2017

Published pages: 79-82

DOI identifier: 10.1109/3M-NANO.2017.8286331

ISBN: 978-1-5386-1081-7