Calibration of atomic force microscope probes using a pneumatic micromanipulation system

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Authors: Hao Zhang, Danish Hussain, Xianghe Meng, Jianmin Song, Hui Xie

Journal title: 2017 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)

Journal publisher: IEEE

Published year: 2017

Published pages: 1-6

DOI identifier: 10.1109/marss.2017.8001941

ISBN: 978-1-5386-0346-8