Design of a XYZ scanner for home-made high-speed atomic force microscopy

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Authors: Kunhai Cai, Xianbin He, Yanling Tian, Xianping Liu, Dawei Zhang, Bijan Shirinzadeh

Journal title: Microsystem Technologies

Journal number: 24/7

Journal publisher: Springer Verlag

Published year: 2018

Published pages: 3123-3132

DOI identifier: 10.1007/s00542-017-3674-4

ISSN: 0946-7076