Development and control methodologies for 2-DOF micro/nano positioning stage with high out-of-plane payload capacity

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Authors: Kunhai Cai, Yanling Tian, Xianping Liu, Dawei Zhang, Jiangkun Shang, Bijan Shirinzadeh

Journal title: Robotics and Computer-Integrated Manufacturing

Journal number: 56

Journal publisher: Pergamon Press Ltd.

Published year: 2019

Published pages: 95-105

DOI identifier: 10.1016/j.rcim.2018.08.007

ISSN: 0736-5845