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Authors: Yanling Tian, Mingxuan Yang, Fujun Wang, Chongkai Zhou, Xingyu Zhao, Dawei Zhang
Journal title: Microsystem Technologies
Journal number: 25/11
Journal publisher: Springer Verlag
Published year: 2019
Published pages: 4257-4268
DOI identifier: 10.1007/s00542-019-04410-6
ISSN: 0946-7076