A Novel Actuator-Internal Micro/Nano Positioning Stage With an Arch-Shape Bridge-Type Amplifier

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Authors: Fujun Wang, Zhichen Huo, Cunman Liang, Beichao Shi, Yanling Tian, Xingyu Zhao, Dawei Zhang

Journal title: IEEE Transactions on Industrial Electronics

Journal number: 66/12

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2019

Published pages: 9161-9172

DOI identifier: 10.1109/tie.2018.2885716

ISSN: 0278-0046