High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy

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Authors: Rong Su, Matthew Thomas, Mingyu Liu, Jeremy Coupland, Richard Leach

Journal title: Applied Optical Metrology III

Journal publisher: SPIE

Published year: 2019

Published pages: 4

DOI identifier: 10.1117/12.2528911

ISBN: 9781-510628984