Fabrication of cross-scale structures by Moiré effect in laser interference lithography

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Authors: Mengnan Liu, Zuobin Wang, Litong Dong, Baishun Sun, Ying Wang, Lu Wang, Zhankun Weng & Yanling Tian

Journal title: Applied Physics B

Journal number: 09462171

Journal publisher: Springer Verlag

Published year: 2022

Published pages: 204

DOI identifier: 10.1007/s00340-022-07916-6

ISSN: 0946-2171