Atomic Layer Deposition of Palladium Coated TiO2/Si nanopillars: ToF-SIMS, AES and XPS characterization study

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Authors: I.Iatsunskyi, G. Gottardi, V. Micheli, R. Canteri, E. Coy, M. Bechelany

Journal title: Applied Surface Science

Journal number: 542

Journal publisher: Elsevier BV

Published year: 2021

DOI identifier: 10.1016/j.apsusc.2020.148603

ISSN: 0169-4332