Side-wall spacer passivated sub- μ m Josephson junction fabrication process

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Authors: Leif Grönberg, Mikko Kiviranta, Visa Vesterinen, Janne Lehtinen, Slawomir Simbierowicz, Juho Luomahaara, Mika Prunnila, Juha Hassel

Journal title: Superconductor Science and Technology

Journal number: 30/12

Journal publisher: Institute of Physics Publishing

Published year: 2017

Published pages: 125016

DOI identifier: 10.1088/1361-6668/aa9411

ISSN: 0953-2048