In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Onur Tokel, Ahmet Turnalı, Ghaith Makey, Parviz Elahi, Tahir Çolakoğlu, Emre Ergeçen, Özgün Yavuz, René Hübner, Mona Zolfaghari Borra, Ihor Pavlov, Alpan Bek, Raşit Turan, Denizhan Koray Kesim, Serhat Tozburun, Serim Ilday, F. Ömer Ilday

Journal title: Nature Photonics

Journal number: 11/10

Journal publisher: Nature Pub. Group

Published year: 2017

Published pages: 639-645

DOI identifier: 10.1038/s41566-017-0004-4

ISSN: 1749-4885