Electrical properties of metal/Al 2 O 3 /In 0.53 Ga 0.47 As capacitors grown on InP

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Authors: Philippe Ferrandis, Mathilde Billaud, Julien Duvernay, Mickael Martin, Alexandre Arnoult, Helen Grampeix, Mikael Cassé, Hervé Boutry, Thierry Baron, Maud Vinet, Gilles Reimbold

Journal title: Journal of Applied Physics

Journal number: 123/16

Journal publisher: American Institute of Physics

Published year: 2018

Published pages: 161534

DOI identifier: 10.1063/1.5007920

ISSN: 0021-8979