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Authors: Markus Hellenbrand, Olli-Pekka Kilpi, Johannes Svensson, Erik Lind, Lars-Erik Wernersson
Journal title: Microelectronic Engineering
Journal publisher: Elsevier BV
Published year: 2019
Published pages: 110986
DOI identifier: 10.1016/j.mee.2019.110986
ISSN: 0167-9317
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