Profiling border-traps by TCAD analysis of multifrequency CV-curves in Al<inf>2</inf>O<inf>3</inf>/InGaAs stacks

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Authors: E. Caruso, J. Lin, K. F. Burke, K. Cherkaoui, D. Esseni, F. Gity, S. Monaghan, P. Palestri, P. Hurley, L. Selmi

Journal title: 2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)

Journal publisher: IEEE

Published year: 2018

Published pages: 1-4

DOI identifier: 10.1109/ulis.2018.8354757

ISBN: 978-1-5386-4811-7