InGaAs FinFETs Directly Integrated on Silicon by Selective Growth in Oxide Cavities

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Authors: Clarissa Convertino, Cezar Zota, Heinz Schmid, Daniele Caimi, Marilyne Sousa, Kirsten Moselund, Lukas Czornomaz

Journal title: Materials

Journal number: 12/1

Journal publisher: MDPI Open Access Publishing

Published year: 2019

Published pages: 87

DOI identifier: 10.3390/ma12010087

ISSN: 1996-1944