Low-Temperature Front-Side BEOL Technology with Circuit Level Multiline Thru-Reflect-Line Kit for III-V MOSFETs on Silicon

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Authors: Stefan Andric, Lars Ohlsson, Lars-Erik Wenrersson

Journal title: 2019 92nd ARFTG Microwave Measurement Conference (ARFTG)

Journal publisher: IEEE

Published year: 2019

Published pages: 1-4

DOI identifier: 10.1109/arftg.2019.8637222

ISBN: 978-1-5386-6599-2