First demonstration of 3D SRAM through 3D monolithic integration of InGaAs n-FinFETs on FDSOI Si CMOS with inter-layer contacts

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Authors: V. Deshpande, H. Hahn, E. O'Connor, Y. Baumgartner, M. Sousa, D. Caimi, H. Boutry, J. Widiez, L. Brevard, C. Le Royer, M. Vinet, J. Fompeyrine, L. Czornomaz

Journal title: 2017 Symposium on VLSI Technology

Journal publisher: IEEE

Published year: 2017

Published pages: T74-T75

DOI identifier: 10.23919/vlsit.2017.7998205

ISBN: 978-4-86348-605-8