InGaAs FinFETs 3D Sequentially Integrated on FDSOI Si CMOS with Record Perfomance

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Authors: C. Convertino, C. B. Zota, D. Caimi, M. Sousa, L. Czornomaz

Journal title: 2018 48th European Solid-State Device Research Conference (ESSDERC)

Journal publisher: IEEE

Published year: 2018

Published pages: 162-165

DOI identifier: 10.1109/essderc.2018.8486862

ISBN: 978-1-5386-5401-9