Demonstration of 3-D SRAM Cell by 3-D Monolithic Integration of InGaAs n-FinFETs on FDSOI CMOS With Interlayer Contacts

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Authors: Veeresh Deshpande, H. Hahn, E. O'Connor, Y. Baumgartner, D. Caimi, M. Sousa, H. Boutry, J. Widiez, L. Brevard, C. Le Royer, M. Vinet, J. Fompeyrine, L. Czornomaz

Journal title: IEEE Transactions on Electron Devices

Journal number: 64/11

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2017

Published pages: 4503-4509

DOI identifier: 10.1109/ted.2017.2755662

ISSN: 0018-9383