High-performance InGaAs FinFETs with raised source/drain extensions

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Authors: Clarissa Convertino, Cezar B. Zota, Daniele Caimi, Marilyne Sousa, Kirsten E. Moselund, Lukas Czornomaz

Journal title: Japanese Journal of Applied Physics

Journal number: 58/8

Journal publisher: IOP Publishing

Published year: 2019

Published pages: 080901

ISSN: 0021-4922