Three-dimensional monolithic integration of III-V and Si(Ge) FETs for hybrid CMOS and beyond

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Authors: V. Deshpande, V. Djara, E. O'Connor, P. Hashemi, T. Morf, K. Balakrishnan, D. Caimi, M. Sousa, J. Fompeyrine, L. Czornomaz

Journal title: Japanese Journal of Applied Physics

Journal number: vol 56

Journal publisher: Institute of Physics

Published year: 2017

Published pages: 04CA05

DOI identifier: 10.7567/JJAP.56.04CA05

ISSN: 1347-4065