Epitaxial trench refill of 4H-SiC by chlorinated chemistry

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Authors: Gerard Colston; Kelly Turner; Arne Renz; Peter Gammon; Marina Antoniou; Philip A. Mawby; Vishal A. Shah

Journal title: Appl. Phys. Lett.

Journal number: 124

Journal publisher: AIP Publishing

Published year: 2024

DOI identifier: 10.1063/5.0210680

ISSN: 1077-3118