Plasmas and acoustic waves to pattern the nanostructure and chemistry of thin films

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Authors: V. Rico, G.F. Regodón, A. Garcia-Valenzuela, A.M. Alcaide, M. Oliva-Ramirez, T.C. Rojas, R. Alvarez, F.J. Palomares, A. Palmero, A.R. Gonzalez-Elipe

Journal title: Acta Materialia

Journal number: 255

Journal publisher: Elsevier BV

Published year: 2023

Published pages: 119058

DOI identifier: 10.1016/j.actamat.2023.119058

ISSN: 1359-6454