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Chasing Abnormalities on Time Series for Predictive Maintenance and Advanced Process Control

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

Multiscale simulations of plasma etching in silicon carbide structures

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

Combining Approaches of Brownian Motion and Similarity Principle to Improve the Remaining Useful Life Prediction

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

Semiconductor Multivariate Time-Series Anomaly Classification Based on Machine Learning Ensemble Techniques

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

Ni-silicide ohmic contacts on 4H-SiC formed by multi pulse excimer laser annealing

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

Shape- and Element-Sensitive Reconstruction of Periodic Nanostructures with Grazing Incidence X-ray Fluorescence Analysi...

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

D6.3.6: SEMI Technology Unites Global Summit Dissemination Factsheets

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

SEMICON Europa 2019 Dissemination Factsheets - 1

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Updated at: 29-04-2024

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Project acronym MADEin4

Multi party privacy preserving machine learning for process control

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

Grazing incidence-X-ray fluorescence for a dimensional and elemental characterization of well-ordered nanostructures

Project: MADEin4

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Project acronym MADEin4

Ensemble Machine Learning Algorithms for Anomaly Detection in Multivariate Time-Series

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures

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Updated at: 29-04-2024

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Project acronym MADEin4

1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

Industry4.0 Productivity Improvement in Major EU Fabs

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

Uncertainties in the reconstruction of nanostructures in {EUV} scatterometry and grazing incidence small-angle X-ray sca...

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

Modelling Ion Production inside an Electron Impact Ionizer for High-Vacuum Gas Analysis

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

D6.3.3: SEMI Technology Unites Global Summit Dissemination Factsheets

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

Projection methods for high numerical aperture phase retrieval

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

A fusion of electronic design, process and metrology in semiconductor manufacturing for improved process optimization an...

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

Surface Topography of Si/TiO2 Stacked Layers on Silicon Substrate Deposited by KrF Excimer Laser Ablation

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

Selective plasma etching of silicon-containing high chi block copolymer for directed self-assembly (DSA) application

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Updated at: 29-04-2024

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Project acronym MADEin4

Predictive discarding of wafers based on power leakage predictions from single layer misalignment data

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

PROLIFIC: A Fast and Robust Profile-Likelihood-Based Muscle Onset Detection in Electromyogram Using Discrete Fibonacci S...

Project: MADEin4

Updated at: 29-04-2024

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Project acronym MADEin4

Penalised robust estimators for sparse and high-dimensional linear models

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Project acronym MADEin4

Penalized wavelet estimation and robust denoising for irregular spaced data

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Project acronym MADEin4

Flexible, boundary adapted, nonparametric methods for the estimation of univariate piecewise-smooth functions

Project: MADEin4

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Project acronym MADEin4

Increase of wafer inspection tool throughput with computational imaging

Project: MADEin4

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Project acronym MADEin4

Phase retrieval from overexposed PSF: a projection-based approach

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Updated at: 29-04-2024

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D6.3.5: ENBIS 2021 data management / machine learning Workshop Dissemination Factsheet

Project: MADEin4

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Wavelet-based robust estimation and variable selection in nonparametric additive models

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Updated at: 29-04-2024

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Resources

Selected filters:

Chasing Abnormalities on Time Series for Predictive Maintenance and Advanced Process Control

Multiscale simulations of plasma etching in silicon carbide structures

Combining Approaches of Brownian Motion and Similarity Principle to Improve the Remaining Useful Life Prediction

Semiconductor Multivariate Time-Series Anomaly Classification Based on Machine Learning Ensemble Techniques

Ni-silicide ohmic contacts on 4H-SiC formed by multi pulse excimer laser annealing

Shape- and Element-Sensitive Reconstruction of Periodic Nanostructures with Grazing Incidence X-ray Fluorescence Analysi...

D6.3.6: SEMI Technology Unites Global Summit Dissemination Factsheets

SEMICON Europa 2019 Dissemination Factsheets - 1

Multi party privacy preserving machine learning for process control

Grazing incidence-X-ray fluorescence for a dimensional and elemental characterization of well-ordered nanostructures

Ensemble Machine Learning Algorithms for Anomaly Detection in Multivariate Time-Series

Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures

1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing

Industry4.0 Productivity Improvement in Major EU Fabs

Uncertainties in the reconstruction of nanostructures in {EUV} scatterometry and grazing incidence small-angle X-ray sca...

Modelling Ion Production inside an Electron Impact Ionizer for High-Vacuum Gas Analysis

D6.3.3: SEMI Technology Unites Global Summit Dissemination Factsheets

Projection methods for high numerical aperture phase retrieval

A fusion of electronic design, process and metrology in semiconductor manufacturing for improved process optimization an...

Surface Topography of Si/TiO2 Stacked Layers on Silicon Substrate Deposited by KrF Excimer Laser Ablation

Selective plasma etching of silicon-containing high chi block copolymer for directed self-assembly (DSA) application

Predictive discarding of wafers based on power leakage predictions from single layer misalignment data

PROLIFIC: A Fast and Robust Profile-Likelihood-Based Muscle Onset Detection in Electromyogram Using Discrete Fibonacci S...

Penalised robust estimators for sparse and high-dimensional linear models

Penalized wavelet estimation and robust denoising for irregular spaced data

Flexible, boundary adapted, nonparametric methods for the estimation of univariate piecewise-smooth functions

Increase of wafer inspection tool throughput with computational imaging

Phase retrieval from overexposed PSF: a projection-based approach

D6.3.5: ENBIS 2021 data management / machine learning Workshop Dissemination Factsheet

Wavelet-based robust estimation and variable selection in nonparametric additive models