ERD

The challenges of heating a sample in vacuum

Project: ID2PPAC

Updated at: 01-10-2024

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Project acronym ID2PPAC

Exploring interactions between hydrogen plasma and construction materials

Project: ID2PPAC

Updated at: 01-10-2024

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Project acronym ID2PPAC

A novel way of modelling plasma induced hydrogen permeation in metals

Project: ID2PPAC

Updated at: 01-10-2024

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Project acronym ID2PPAC

The Challenges of Heating a Sample

Project: ID2PPAC

Updated at: 01-10-2024

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Project acronym ID2PPAC

Periodic Reporting for period 2 - ID2PPAC (Integration of processes and moDules for the 2 nm node meeting Power Performa...

Project: ID2PPAC

Updated at: 26-06-2024

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Project acronym ID2PPAC

Enabling the next step for on-product performance with High NA EUV system

Project: ID2PPAC

Updated at: 10-11-2023

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Project acronym ID2PPAC

High NA EUV: development towards introduction at the customer

Project: ID2PPAC

Updated at: 10-11-2023

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Project acronym ID2PPAC

High NA EUV towards introduction at the customer

Project: ID2PPAC

Updated at: 10-11-2023

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Project acronym ID2PPAC

High NA EUV: progress update and mask impact

Project: ID2PPAC

Updated at: 10-11-2023

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Project acronym ID2PPAC

Imaging performance of low-n absorbers at the optical resolution limits of high NA EUV systems

Project: ID2PPAC

Updated at: 31-10-2023

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Project acronym ID2PPAC

Modeling of multilayer degradation and impact on lithographic imaging metrics

Project: ID2PPAC

Updated at: 31-10-2023

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Project acronym ID2PPAC

Pathfinding the perfect EUV mask: Mask imperfections and its impact on the imaging

Project: ID2PPAC

Updated at: 31-10-2023

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Project acronym ID2PPAC

Mask3D effects in EUV lithography and their impact on resolution enhancements

Project: ID2PPAC

Updated at: 31-10-2023

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Project acronym ID2PPAC

High NA EUV enabling cost efficient scaling for N+1 technology nodes

Project: ID2PPAC

Updated at: 31-10-2023

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Project acronym ID2PPAC

High-NA EUVL exposure tool: program progress and mask interaction

Project: ID2PPAC

Updated at: 31-10-2023

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Project acronym ID2PPAC

Resources

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The challenges of heating a sample in vacuum

Exploring interactions between hydrogen plasma and construction materials

A novel way of modelling plasma induced hydrogen permeation in metals

The Challenges of Heating a Sample

Periodic Reporting for period 2 - ID2PPAC (Integration of processes and moDules for the 2 nm node meeting Power Performa...

Enabling the next step for on-product performance with High NA EUV system

High NA EUV: development towards introduction at the customer

High NA EUV towards introduction at the customer

High NA EUV: progress update and mask impact

Imaging performance of low-n absorbers at the optical resolution limits of high NA EUV systems

Modeling of multilayer degradation and impact on lithographic imaging metrics

Pathfinding the perfect EUV mask: Mask imperfections and its impact on the imaging

Mask3D effects in EUV lithography and their impact on resolution enhancements

High NA EUV enabling cost efficient scaling for N+1 technology nodes

High-NA EUVL exposure tool: program progress and mask interaction